EX-2.1
from 8-K
72 pages
Agreement and Plan of Merger by and Among Soluris Inc. Sequoia Acquisition Corp., Nanometrics Incorporated, the Stockholders Party Hereto, and With Respect to Certain Portions Only Alain G. Bojarski, as Representative of the Security Holders of Soluris Inc. and U.S. Bank National Association, as Escrow Agent Dated as of March 15, 2006
12/34/56