EX-10.1
from 10-Q
72 pages
Agreement and Plan of Merger by and Among Amtech Systems, Inc., Entrepix, Inc., Emerald Merger Sub, Inc., Timothy P. Tobin, as the Shareholders’ Representative and Timothy P. Tobin and Steven N. Horowitz, as the Key Shareholders Dated as of January 17, 2023
12/34/56