EX-10.31
from 10-K
3 pages
Amendment (“Amendment”) Dated as of November 14, 2002 to the Agreement With an Effective Date of December 15, 2000 (Hereinafter Referred to as the “Agreement”) by and Between International Business Machines Corporation, a New York Corporation (“Ibm”), and Ibis Technology Corporation, a Massachusetts Corporation (“Ibis”). Whereas Ibis and Ibm Are Entering Into an Agreement Dated November 14, 2002, Defining the Joint Development by Ibis and Ibm of an Enhanced Process for Implanting Silicon Wafers With Oxygen and Annealing Such Wafers (“Joint Development Agreement”); And
12/34/56